Coaxial ion-photon system

A novel dual beam column is presented in which the light beam of an optical microscope is coaxial with the focused ion beam (FIB). The FIB using a LMI S delivers a 30keV, gallium ion beam with simulated minimal beam size of 10 nm diameter. With a Schwarzschild objective module integrated into the FEB objective system, the optical microscope is able to provide simultaneously both a 34x diffraction-limited optical image with a live FEB image. System performance of this "OptiFIB" is characterized and potential applications a re discussed. (C) 2001 Elsevier Science Ltd. All ri.-hts reserved.