Development of an EB/FIB integrated test system

Authors
Miura, K Nakamae, K Fujioka, H
Citation
K. Miura et al., Development of an EB/FIB integrated test system, MICROEL REL, 41(9-10), 2001, pp. 1489-1494
Citations number
10
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS RELIABILITY
ISSN journal
00262714 → ACNP
Volume
41
Issue
9-10
Year of publication
2001
Pages
1489 - 1494
Database
ISI
SICI code
0026-2714(200109/10)41:9-10<1489:DOAEIT>2.0.ZU;2-W
Abstract
We have developed an EB/FIB integrated test system, where the in-situ verif ication of repair by waveform measurement in the FIB system is carried out. We discuss the characteristics of the waveform measurement by the FIB syst em. From experiments, the time resolution, the voltage sensitivity, and the damage control criterion are derived. We apply the system to a faulty VLSI chip in order to show its validity. (C) 2001 Elsevier Science Ltd. All rig hts reserved.