Citation
Ei. Cherepov et al., Redistribution of nitrogen implanted in the crystals of synthetic diamond, NUCL INST B, 183(3-4), 2001, pp. 301-304
Citations number
11
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X
→ ACNP
Volume
183
Issue
3-4
Year of publication
2001
Pages
301 - 304
Database
ISI
SICI code
0168-583X(200110)183:3-4<301:RONIIT>2.0.ZU;2-Q
Abstract
The redistribution of nitrogen atoms implanted in synthetic diamond crystal
s was investigated by secondary ion mass-spectrometry in course of an isoth
ermal annealing program at 1400 degreesC during 1, 5 and 20 h. It was shown
that the nitrogen profiles spread at a macroscopic scale, and the broadeni
ng is well described in terms of the diffusion movement of impurity atoms.
The preliminary estimates of diffusion coefficients were obtained: 2.3 x 10
(-15) cm(2)/s for 1 h annealing, 8.5 x 10(-16) cm(2)/s for 5 h annealing an
d 3.7 x 10(-16) cm(2)/s for 20 h annealing. (C) 2001 Elsevier Science B.V.
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