Lifetimes of hydrogen and deuterium related stretch modes in Si are measure
d by high-resolution infrared absorption spectroscopy and transient bleachi
ng spectroscopy. The lifetimes are found to be extremely dependent on the d
efect structure, ranging from 2 to 295 ps. Against conventional wisdom, we
find that lifetimes of Si-D modes typically are longer than for the corresp
onding Si-H modes. The potential implications of the results on the physics
of electronic device degradation are discussed.