This paper describes the development of a new application of a traveling-wa
ve-type ultrasonic motor as an orienting stage with the precision to cover
the fine rotation of a tool at a submicrometer-level orienting system. The
defined term of orienting here implies the micro positioning with a fine ro
tation motion. The proposed fine-orienting stage consists of a half spheric
al-type rotor and three pieces of ring-type stators. The fine rotation at t
he center of the rotor is determined by controlling friction forces, which
generate rotation at the three contact points between the rotor and the sta
tors. A method to rotate the rotor in fine rotation to attain a desired ori
entation is also proposed. Three different sizes of ultrasonic motors are p
resented to verify performance of the ultrasonic motor as a fine-orienting
stage and to investigate an extreme of the ultrasonic motor motion. The res
ults of the three models of the orienting stages are discussed and the vali
dity of the ultrasonic motor as a fine-orienting stage is confirmed.