Accuracy of measurement of microrelief dimensions from a scanning electronmicroscope image of a cleavage

Authors
Volk, CP Novikov, YA Ozerin, YV Rakov, AV
Citation
Cp. Volk et al., Accuracy of measurement of microrelief dimensions from a scanning electronmicroscope image of a cleavage, MEAS TECH R, 44(4), 2001, pp. 365-369
Citations number
7
Categorie Soggetti
Instrumentation & Measurement
Journal title
MEASUREMENT TECHNIQUES
ISSN journal
05431972 → ACNP
Volume
44
Issue
4
Year of publication
2001
Pages
365 - 369
Database
ISI
SICI code
0543-1972(200104)44:4<365:AOMOMD>2.0.ZU;2-Z
Abstract
The accuracy of measurement of microrelief dimensions in a scanning electro n microscope on a cleavage surface of a specimen is estimated. That accurac y can be about 10% for good cleavage surfaces, being slightly higher for th e dimensions of the tops of relief elements than for the bases. It has been found necessary measurements of dimensions on a "mathematical cleavage." A n example of such measurements is given.