Designing and modelling of a grating-based displacement micro-transducer

Fourier analysis is used to formulize and characterize grating-based displa cement transducers. The analysis is carried out for linear and radial binar y grating sensors, and for both single and grating-pair sensors. The influe nce of the grating (pair) structure and the receiving window on sensing sen sitivity, linearity of response and dynamic range is investigated. Several types of photoresist grating are fabricated and are used to experimentally characterize the grating sensor. The tested result is found to be in genera l agreement with the analysis result.