Analysis of near-field intensity distributions of high-compression Talbot array illuminators using rigorous diffraction theory

The technology nowadays employed in the field of binary optics allows a rel atively easy fabrication of grating structures down to the wavelength regio n. The analysis of light propagation through such grating structures requir es the use of rigorous diffraction theories such as the rigorous coupled-wa ve analysis (RCWA), in order to take proper account of polarization effects in the electric and magnetic field and the thickness of the grating. In th is paper, we examine the near-field intensity distributions and associated illumination efficiencies of Talbot array illuminators (TAIL's) with compre ssion ratios of 8 and 16 using RCWA. The high illumination efficiency obser ved close to the grating surface is expected to bring about new application s of TAIL's in the field of super-resolution and near-field optics.