Atomic resolution scanning transmission electron microscopy

Citation
Nd. Browning et al., Atomic resolution scanning transmission electron microscopy, PHYS ST S-B, 227(1), 2001, pp. 229-245
Citations number
50
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
PHYSICA STATUS SOLIDI B-BASIC RESEARCH
ISSN journal
03701972 → ACNP
Volume
227
Issue
1
Year of publication
2001
Pages
229 - 245
Database
ISI
SICI code
0370-1972(200109)227:1<229:ARSTEM>2.0.ZU;2-0
Abstract
Recent developments in scanning transmission electron microscopy (STEM) now make it routinely possible to obtain direct images and spectra from interf ace and defects structures with atomic spatial resolution. Here we describe the experimental conditions required to set-up and align a 200 kV STEM/TEM microscope to perform this analysis. The various imaging and analysis tech niques will be illustrated with examples from interfaces in H-VI and III-V quantum dot systems and dislocation cores in GaN.