Facet growth under stress: the limits of strained-layer stability - art. no. 156101

Authors
Citation
J. Tersoff, Facet growth under stress: the limits of strained-layer stability - art. no. 156101, PHYS REV L, 8715(15), 2001, pp. 6101
Citations number
16
Categorie Soggetti
Physics
Journal title
PHYSICAL REVIEW LETTERS
ISSN journal
00319007 → ACNP
Volume
8715
Issue
15
Year of publication
2001
Database
ISI
SICI code
0031-9007(20011008)8715:15<6101:FGUSTL>2.0.ZU;2-J
Abstract
A crystal facet is metastable under stress, but the process of growth or su blimation roughens the facet and is expected to render it unstable. This po ses a fundamental limit for heteroepitaxial growth of planar layers, e.g.. in semiconductor devices. An analysis shows that this facet-growth instabil ity can be suppressed to an arbitrary degree by growing slowly. Moreover, t he local stress ("force dipole") inherent in atomic steps introduces a new, purely kinetic effect that dominates at low strain and can render planar g rowth dynamically stable.