300mm fab automation can meet advanced defect detection needs

Authors
Spicer, R Gudmundsson, D Nurani, R
Citation
R. Spicer et al., 300mm fab automation can meet advanced defect detection needs, SOL ST TECH, 44(10), 2001, pp. 54
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
44
Issue
10
Year of publication
2001
Database
ISI
SICI code
0038-111X(200110)44:10<54:3FACMA>2.0.ZU;2-U
Abstract
Built-in particle inspection is not likely to provide benefit over a compre hensive standalone inspection approach that is facilitated by 300mm fab aut omation and robotics. Among other justifications, significant time-to-detec t benefits may be achievable through optimized automation and robot- ics su pport and fab layout without the loss of flexibility. This avoids the added capital cost associated with built-in detection, which may offer little in cremental benefit once automation and fab layout are optimized.