Controlling maintenance on aluminum etch system exhaust

Authors
Sexton, S Gu, YF
Citation
S. Sexton et Yf. Gu, Controlling maintenance on aluminum etch system exhaust, SOL ST TECH, 44(10), 2001, pp. 95
Citations number
3
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
44
Issue
10
Year of publication
2001
Database
ISI
SICI code
0038-111X(200110)44:10<95:CMOAES>2.0.ZU;2-7
Abstract
Maintenance of aluminum etch systems can be reduced and uptime significantl y increased by keeping exhaust byproducts in a vapor phase and then trappin g them upstream of the vacuum pump, thus preventing chemical reactions at t he scrubber. This can accomplished with a properly designed exhaust managem ent system that uses heated lines and a unique nitrogen boundary at the scr ubber inlet.