Characterization of diffraction gratings by use of a tabletop soft-x-ray laser

We have demonstrated the use of a high-repetition-rate 46.9-nm tabletop las er to characterize diffraction gratings designed for grazing-incidence oper ation in the soft-x-ray spectral region. The efficiencies for various diffr action orders were measured as a function of angle of incidence and compare d with the results of model simulations. This measurement technique provide s benchmarks with which to improve electromagnetic codes used in the design of soft-x-ray diffraction gratings. The results illustrate the potential o f compact tabletop soft-x-ray lasers for use as a new tool for characteriza tion of short-wavelength optics at the manufacturer's site. (C) 2001 Optica l Society of America.