Jp. Krumme et al., GROWTH, MORPHOLOGY AND SUPERCONDUCTIVITY OF EPITAXIAL (RE)(1)BA2CU3O7-DELTA FILMS ON SRTIO3 AND NDGAO3 SUBSTRATES, Acta Physica Polonica. A, 92(1), 1997, pp. 55-68
The growth of (RE)(1)Ba2Cu3O7-delta (RE: Yt Nd) films on NdGaO3 and Sr
TiO3 substrates by ion-beam and dc-/rf-magnetron sputter deposition is
discussed in the framework of growth kinetics, oxygen exchange, epita
xial relations, substrate crystal orientation, in-plane coherence, vic
inal substrate cuts, overgrowth on steps, superconductor/insulator com
binations, and patterning by ion-beam etching. The process conditions
for ion-beam and magnetron sputter deposition are briefly outlined.