Epitaxial LuBa2Cu3O7-delta films were prepared by flash evaporation MO
CVD on LaAlO3, SrTiO3, LaSrGaO4 and ZrO2(Y2O3) single crystalline subs
trates. The highest T-c and j(c) (77 K, 100 Oe) values were 89 K, 2.7
x 10(6) A/cm(2) (LaAlO3) and 88 K, 1.5 x 10(6) A/cm(2) (SrTiO3) respec
tively. The occurrence of secondary phases inclusions in LuBa2Cu3O7-de
lta films correlates with the possibility of epitaxial relations with
the film matrix or the substrate.