Silicon couplers for microfluidic applications

Several types of silicon fluidic coupler have been designed, fabricated, an d tested to facilitate external connections to MEMS (microelectromechanical systems) fluidic devices. By using both bulk micromachining and DRIE (deep reactive ion-etching) techniques, couplers of different geometry have been produced for use with any standard MEMS fluidic port. In addition, coupler s are easily modified to accommodate any arbitrary fluidic port geometry. F or ease of use, these couplers interface with PEEK (polyetheretherketone) a nd fused-silica capillary tubing, both of which are commonly used in HPLC ( highperformance liquid chromatography) systems and are supported by a wide range of plumbing products. Coupler performance was evaluated and an operat ing range of at least 0-8963 kPa (0-1300 psig) is attainable.