The degradation behavior of NPN Si/SiGe/Si heterojunction bipolar transisto
rs, grown by solid-source molecular beam epitaxy (MBE), has been studied by
accelerated lifetime testing at different ambient temperatures. The degrad
ations of the de current gain and the microwave performance of the devices
are explained in terms of recombination enhanced impurity diffusion (REED)
of boron atoms from the base region and the subsequent formation of parasit
ic energy barriers at the base-emitter and base-collector junctions.