Nanoscale ferromagnets (GaMn) with the implantation of Mn+ ions have been i
ncorporated into unintentionally doped (n-type) GaN epilayers grown on sapp
hire substrate by molecular beam epitaxy (MBE). Energy dispersive X-ray (ED
X) spectrometry, atomic force and magnetic force microscopy (AFM and MFM) a
re used to characterize the GaMn precipitates which form within the GaN epi
layer. MFM images reveal nanoscale ferromagnets (GaMn), and a small magneti
c hysteresis loop indicates that there are ferromagnetic particles in our G
aN:Mn layer involving the paramagnetic property and is measured by supercon
ducting quantum interference device (SQUID) magnetometer.