The amorphization of Ni-Nb multilayered alloy films was studied by Ar+ ion-
beam-assisted deposition (IBAD). The Ar+ ion energies were from 2 to 8 keV.
Some amorphous alloys were obtained in the experiment and the nominal comp
osition range favoring amorphization was determined to be 20-80 at.% Ni. A
new hcp phase was formed in the Ni80Nb20 films by MAD with 8 keV Ar+ ion en
ergy. The Nb-rich solid solution with fcc structure was also obtained in so
me samples. The evolution of phase structure is interpreted by kinetics of
the far from equilibrium process.