M. Kuranioto et al., Novel ridge-type InGaN multiple-quantum-well laser diodes fabricated by selective area re-growth on n-GaN substrates, JPN J A P 2, 40(9AB), 2001, pp. L925-L927
A novel ridge structure fabricated by selective-area epitaxial re-growth is
proposed for InGaN multiple-quantum-well (MQW) laser diodes (LDs). This te
chnique is capable of precisely controlling the active ridge width and heig
ht, thus enabling stable single tran sverse-mode operation. Together with a
backside n-contact on a low-dislocation-density GaN substrate, this struct
ure provides high productivity and performance for GaN-based blue-violet LD
s. A stable fundamental transverse mode up to 40 mW was demonstrated for th
e certain range of ridge dimensions. The minimum aspect ratio of the far-fi
eld patterns (FFPs) was about 2.1 in the fabricated ridge-type InGaN MQW LD
s.