We present an in situ investigation of As-desorption from the (001) InP sur
face using surface photoabsorption (SPA). At 470 degreesC, we observed that
the SPA signals along [110] remained unchanged even after the AsH3 supply
was turned off, while the SPA signal along [110] showed a sharp increase as
reported previously. We also measured SPA spectra at several stable states
and found that the surface after AsH3 was turned off could not reach that
of an In-stabilized surface. We interpret these results in terms of As-de-s
orption occurring possibily as a two-step process, in contrast to P-desorpt
ion of a one step process.