Dry etch damage is a potential worry when etching III-V semiconductors. Eve
n though very low levels of damage are possible in modern dry etch processe
s, it is nevertheless of interest to be able to detect any residual damage
and understand its origins. We have used measurements of photoluminescence
intensity from GaAs and InGaAs quantum well heterostructures to probe the d
amage in a non-invasive way. At low damage levels, two factors influencing
possible damage penetration have been found: the ratio of atomic to molecul
ar ions in the discharge and the effect of ambient light. Samples were etch
ed using SiCl4 reactive ion etching and also a more complex multi-component
discharge. Comparative studies were made on samples bombarded by the separ
ate constituent ions of a SiCl4 discharge using a mass-resolving ion implan
ter fitted with a deceleration lens. The experiments show that molecular io
ns contribute less to deep damage than do atomic ions. This is relevant, fo
r example, if using high pump powers to sustain the discharge, such as in I
CP or ECR. Further studies of laser illumination on the sample during etchi
ng show that a form of radiation enhanced diffusion can modify the damage d
istribution. This is relevant, for example, if laser interferometry is used
for end-point detection. Thus for low damage in low damage etch processes,
etch parameters that minimize atomic ion content in the discharge should b
e used and ambient illumination should be avoided if possible.