Dielectric breakdown of titania ceramics was investigated with respect to t
he precurrent which is the current flow before breakdown. The precurrent be
havior can be divided into two regions; an electron multiplication region i
n which carrier electron increases with a constant rate and a critical curr
ent increase just before the breakdown. Optical microscopic observation ind
icated that a part of titania ceramics melted during dielectric breakdown.
Relation between critical current and applied electric field, as well as th
e electric power and heat calculated from the critical current, supported t
he observed melt of titania ceramics.