REALIZATION OF ALGAAS ANTIDOT ARRAYS BY PULSED-LASER INTERFERENCE GRATINGS

AlGaAs antidot arrays with about 10(7) antidots are produced by single -shot interference processing with a pulsed high-power Nd:YAG laser sy stem. We apply magnetotransport experiments and atomic force microscop y (AFM) to explore the electronic and geometric properties of the arra ys. The size of the antidot arrays are 3 mmx3 mm and the period varies from 400 to 1000 nm. The dots are elliptic or circular and have diame ters ranging from 255 to 690 nm. The magnetotransport experiments are performed at 1.5 K in van der Pauw contact configuration. The laser st ructuring leaves the two dimensional electron density nearly unchanged but decreases the mobility by a factor of about 30. Several maxima ar e detected in the low magnetic field magnetoresistivity which are disc ussed based on the geometric data determined by AFM. (C) 1997 American Institute of Physics.