Study of electrical characteristics of porous alumina sensors for detection of low moisture in gases

It is well known that the electrical properties of porous alumina are sensi tive to moisture and have potential use as humidity sensors. This paper pre sents a new type of micro-humidity sensor based on porous alumina. Here a m oisture sensor based on porous alumina has been developed with interdigitat ed thick film electrodes. for the measurement of moisture concentration in the range of 50-100 ppm. The sensors have good sensitivity and are highly r eproducible. In this paper, the sensor design, fabrication and characteriza tion at different gaseous atmospheres and with varying moisture levels of g ases are discussed. (C) 2001 Elsevier Science B.V. All rights reserved.