Optical characterization techniques for process monitoring

Authors
Pickering, C
Citation
C. Pickering, Optical characterization techniques for process monitoring, SURF INT AN, 31(10), 2001, pp. 909-914
Citations number
27
Categorie Soggetti
Physical Chemistry/Chemical Physics
Journal title
SURFACE AND INTERFACE ANALYSIS
ISSN journal
01422421 → ACNP
Volume
31
Issue
10
Year of publication
2001
Pages
909 - 914
Database
ISI
SICI code
0142-2421(200110)31:10<909:OCTFPM>2.0.ZU;2-S
Abstract
The aim of this special issue is to bring to the attention of the surface s cience community the potential and application of optical techniques. This paper gives an overview of the major optical characterization techniques an d the subsequent papers. Where possible, links with other surface science t echniques are discussed and the use of optical methods for process monitori ng and control is emphasized. (C) Crown Copyright 2001. Published by John W iley & Sons, Ltd.