H. Nakayama et al., Photo-thermal excitation gas-source MBE growth of super-doped Si : Mn for spin-photonics applications, THIN SOL FI, 395(1-2), 2001, pp. 230-234
Crystalline Si thin films doped with transition metal elements far beyond t
he solid solubility are named here as 'super-doped Si:TM' (TM = transition
metals). Super-doped Si:Mn thin films with doping levels of more than 10% h
ave been grown by using a photo-thermal excitation gas-source molecular bea
m epitaxy (GSMBE) technique. The GSMBE apparatus used here was equipped wit
h a 'hot W-filament cell', and hence it is called photo-thermal excitation
GSMBE. The hot W-filament cell decomposed quite effectively the source of S
iCl2H2 molecules and enabled the growth of polycrystalline super-doped Si:M
n solid-solution films at substrate temperatures as low as 300 degreesC. Au
ger electron spectroscopy has revealed the characteristic valence electron
spectra arising from the valence-electron hybridization between 3d electron
s of Mn and s-p electrons of Si. (C) 2001 Elsevier Science B.V. All rights
reserved.