FLOAT CHARACTERISTICS OF SQUEEZE-FILM GAS BEARING WITH ELASTIC HINGESFOR LINEAR MOTION GUIDE

In this paper we describe the float characteristics of a new type of s queeze-film gas bearing which can be used to realize non-contact linea r-motion guide systems which do not require supply of pressurized air. Piezoelectric actuators and elastic hinges are used to induce vibrati on of the bearing and generate squeeze-film pressure under the bearing . In a theoretical analysis, a simple dynamic model of the bearing str ucture is presented. The influences of the displacement and vibrationa l frequency of the piezoelectric actuators on the float characteristic s are investigated theoretically and experimentally, Furthermore, the load capacity at a vibrational frequency of 2 400 Hz and the float cha racteristics at the resonance frequency of the bearing are measured. I t was found that the bearing can be used to realize a non-contact line ar motion guide and that the dynamic model presented in this paper can be used for accurate prediction of the float characteristics of the b earing.