Gas-sensing properties of spin-coated indium oxide film on various substrates

Indium oxide thin films were spin-coated uniformly on alumina and silicon s ubstrates with different roughness for the fabrication of gas-sensing films by a novel method of aqueous acetic acid solution dissolving ln(OH)(3) and ammonium carboxymethyl cellulose. The effects of material properties and s urface morphologies of the substrate on film formation and gas-sensing prop erties of the spin-coated films were studied for various kinds of substrate s. Gas-sensing properties including sensitivity, selectivity and the rates of response and recovery were found to be strongly dependent on the kind of substrate and the surface roughness of the substrate as well as film thick ness and operating temperature. (C) 2001 Kluwer Academic Publishers.