Microstructural pressure sensor based on an enhanced resonant mode hysteresis effect

Enhanced hysteresis effects are seen in the resonant behavior of a magnetic ally actuated oscillating micro cantilever at large deflections. These effe cts, which are produced by resonant mode coupling, take the form of abrupt changes in the amplitude of oscillation. These changes in amplitude and the actuating frequencies at which they occur depend on whether the actuating frequency is being increased or decreased. We have fabricated a microcantil ever in which this phenomenon is strongly affected by the damping produced by the pressure of ambient gas. We have investigated this device for use as a pressure sensor in air from 10(-3) to 10(2) Torr. (C) 2001 American Vacu um Society.