Fiber optic catalytic probe for weakly ionized oxygen plasma characterization

Construction and operation of a novel fiber optic catalytic probe is presen ted. The probe is intended for measurements of atomic oxygen density in pla sma postglows. The operation of the probe is based on a catalytic recombina tion of oxygen atoms and remote temperature sensing via optical fiber. Comp ared to the classical catalytic probes, the new approach results in smaller dimensions, better sensitivity, and higher immunity to the electromagnetic interference. Comparative measurements of atomic oxygen density performed simultaneously with both types of probes demonstrated a superior performanc e of the novel probes. (C) 2001 American Institute of Physics.