Piezo-driven metrological multiaxis nanopositioner

We report on the development of a metrological multiaxis nanopositioning de vice, which is operated by the piezo-based inertial method, as a sample sta ge for scanning probe microscopy. It has long moving range, unlimited in pr inciple, and nanometer (microradian) resolution. Two operation methods, ine rtial sliding and inertial walking, can be applied to the stage and the ine rtial operating method can make the stage have a simple and compact structu re. By the structure and operation method high positioning stability can be obtained which is an important requirement for scanning probe microscopy. For a metrological nanopositioner, a three axes laser interferometric sensi ng scheme is adopted for planar motion and a 15 channel high voltage amplif ier is designed and computer based digital-to-analog conversion is adopted. Therefore the nanopositioner can be feedback controlled with many choices of voltage wave forms and control methods. Design of the nanopositioner and piezo-driver and experimental results are presented. The device provides s tep sizes of 0.016-10 mum at frequency up to about 7 kHz. The rotational ra nge is limited by the interferometer alignment, 0.2 degrees, and the step s ize is 0.17-103 arcsec. (C) 2001 American Institute of Physics.