Ch. Ho et al., Novel electronic design for double-modulation spectroscopy of semiconductor and semiconductor microstructures, REV SCI INS, 72(11), 2001, pp. 4218-4222
The double-modulation reflectance technique has proven to be a powerful cha
racterization tool of semiconductors applied in high-background-light-inter
ference systems. In this article, we present a novel and inexpensive electr
onic-circuit design for implementing the double-modulation measurements usi
ng only one lock-in amplifier. The electronic design is fabricated in an ac
cessory hardware of modulation spectroscopy which can easily select the dou
ble- or single-modulation mode via a manual switch. Detailed design diagram
s of the electronic hardware are described. Measurements of some representa
tive samples of semiconductors and actual device structures are carried out
. Experimental results demonstrated the well-behaved performance of this de
sign. (C) 2001 American Institute of Physics.