Microstructure and mechanical properties of Fe-N/TiN magnetic multilayers with different thickness of TiN layers

Authors
Xu, GY Lu, XC Chang, XR Li, LKY
Citation
Gy. Xu et al., Microstructure and mechanical properties of Fe-N/TiN magnetic multilayers with different thickness of TiN layers, SCI CHINA A, 44, 2001, pp. 375-380
Citations number
12
Categorie Soggetti
Multidisciplinary
Journal title
SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY
ISSN journal
10016511 → ACNP
Volume
44
Year of publication
2001
Supplement
S
Pages
375 - 380
Database
ISI
SICI code
1001-6511(200108)44:<375:MAMPOF>2.0.ZU;2-5
Abstract
Fe-N/TiN multilayers (MLs) with different thickness of TiN layers and 20nm thickness of Fe-N layers deposited by DC magnetron sputtering technique wer e studied. The structure and composition of MLs were characterized with low -angle X-ray diffraction (LXRD), Augur depth profile and X-ray diffraction (XRD). The hardness and reduced elastic modulus of these multilayers were s tudied using a nano-hardness tester (NHT). The bonding strength between the MLs and the substrate was measured using a nano-scratch tester (NST). Effe cts of the thickness of the TiN layer on critical load, hardness and reduce d elastic modulus of the MLs were studied.