Tribological problems of surface IC processed MEMS

Successful microactuators of simple mechanics on silicon chip are a prerequ isite for monolithic microrobotic systems. Recent development in microelect romechanical systems (MEMS) has led to the success in building new types of microactuators. Based on the design of microgrippers and linear microvibro motor, which were fabricated using surface micromachining, the analysis of contact pairs and opposite movement forming of moving elements is given in this paper. The source and mechanism of tribology of MEMS are discussed. As sociated with the developing history of macro-machine, several research met hods and possible existing problems about the tribology of surface IC proce ssed MEMS are pointed out.