Growth of epitaxial anatase (001) and (101) films

Anatase (TiO2) films have been grown by oxygen plasma assisted molecular be am epitaxy. Reflection high-energy electron diffraction and low energy elec tron diffraction indicate that the films grow epitaxially with respect to t he substrate. For (001) anatase films grown on SrTiO3 (001) we have found t hat a (1 X 4) reconstruction is formed under growth conditions. On cooling to room temperature this reconstruction remains. The (101) anatase films we re grown on a natural anatase (101) substrate. The natural substrate (i.e., mineral) was used due to the difficulty in obtaining good lattice matched materials for this surface orientation. X-Ray photoelectron spectroscopy re sults indicate that both surfaces are fully oxidized with Ti in the 4+ oxid ation state. (C) 2001 Elsevier Science BN. All rights reserved.