Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry

Authors
Tikhonravov, AV Trubetskov, MK Krasilnikova, AV Masetti, E Duparre, A Quesnel, E Ristau, D
Citation
Av. Tikhonravov et al., Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry, THIN SOL FI, 397(1-2), 2001, pp. 229-237
Citations number
23
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
397
Issue
1-2
Year of publication
2001
Pages
229 - 237
Database
ISI
SICI code
0040-6090(20011001)397:1-2<229:IOTSMO>2.0.ZU;2-B
Abstract
Spectroscopic ellipsometry is a sensitive and reliable diagnostic tool for the optical properties of thin films and multi-layer coatings. In this pape r we have derived new formulas permitting qualitative and quantitative anal ysis of the surface microroughness in the case where the refractive index o f the film is close to that of the substrate. Theoretical results are appli ed to the developing of experimental data for lanthanum fluoride and magnes ium fluoride thin films. (C) 2001 Elsevier Science B.V. All rights reserved .