Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy

Nanotribological characterization of amorphous hydrogenated carbon (a-C:H) films is performed by scanning probe microscopy. The a-C:H films are produc ed on silicon substrate by electron cyclotron resonance microwave plasma ch emical vapor deposition (ECR-MPCVD). The influences of different percentage s of hydrogen (H-2) and methane (CH4) in the gas-discharge plasmas on the n anotribological characteristics are investigated. Scanning probe nanotribol ogical tests, including the nano-friction, nano-wear and nano-scratch, are carried out. Large quantitative variations of the friction coefficient as w ell as the wear depth are found for different H-2 content percentages in so urce gas. The results indicate that a higher H-2 content in the source gas is beneficial to wear and scratch resistance, and produces a lower friction coefficient and that source gas H, content plays an important role in the tribological characteristics of diamond-like films. (C) 2001 Elsevier Scien ce B.V. All rights reserved.