The present work reports Er-doped channel oxidized porous silicon waveguide
s (OPSWG) formed from n(+)-type Si by the two-step anodisation process. Er
has been introduced into porous silicon before oxidation by a cathodic trea
tment in 0.1 M Er (NO3)(3) aqueous solution. A correlation between Er conce
ntration and refractive index profiles has shown dominant core doping with
Er relative to cladding regions. Reported Er concentration of 0.8 at.% in t
he OPSWG is large enough to attain the amplification effect. (C) 2001 Elsev
ier Science B.V. All rights reserved.