X-ray diffraction analysis residual stresses and elasticity constants in thin films

The understanding of physical phenomenon occurring in supported thin films needs a characterisation of both microstructure and mechanical state of ela borated thin films. X-ray diffraction is a powerful technique which allows to manage efficiently both aspects in the case of crystalline materials, Wh en coupling with in-situ tensile tester, one may study elasticity propertie s of each individual phase of multilayer thin films.