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Plasma physics. Part two: diagnosis of reactive plasmas
Authors
Remy, M
Henrion, G
Fabry, M
Citation
M. Remy et al., Plasma physics. Part two: diagnosis of reactive plasmas, VIDE, 56(301), 2001, pp. 626-649
Categorie Soggetti
Material Science & Engineering
Journal title
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ISSN journal
12660167 →
ACNP
Volume
56
Issue
301
Year of publication
2001
Pages
626 - 649
Database
ISI
SICI code
1266-0167(2001)56:301<626:PPPTDO>2.0.ZU;2-X