Deformation curves of Ta-silicide thin films obtained in cyclic nanoindentation experiments

Mechanical properties of amorphous and crystalline Ta-silicide thin films w ere studied in cyclic depth-sensing nanoindentation experiments. At the fir st loading cycle (up to peak load P-1) an initial indent of h(o) in depth w as formed. Then without shifting, the indenter was reloaded to a higher loa d of P-2. Up to P-1, the elastic loading of the initial indents took place. When the repeated load exceeded P-1, the plastic deformation of the initia l indent began. Using the initial indent reloading data, the deformation cu rves of Ta-silicide thin films at point loading have been found. Such defor mation curves do not depend on the depth of the initial indent and characte rize the mechanical behavior of materials under point loading. Crystallizat ion of amorphous phase during annealing caused an appreciable change of the Ta-silicide thin film deformation curve. Both elastic and plastic properti es of Ta-silicide improved due to transition from amorphous to crystalline state.