T. Kodama et al., GENETIC ALGORITHMS AS APPLIED TO RECONSTRUCTION OF SURFACE-MORPHOLOGYFROM AN SEM IMAGE, Journal of Electron Microscopy, 46(3), 1997, pp. 215-220
A reconstruction method of surface morphology from a scanning electron
microscope (SEM) image is proposed. In comparison with conventional s
tereometric and multiple-detector methods, the proposed system require
s only a secondary electron image taken by a conventional SEM for reco
nstruction of microstructures of a specimen surface. This method is an
application of genetic algorithms, which are search algorithms based
on the mechanics of natural selection and genetics, to surface morphol
ogy in SEM. To test the capability of this method, a cross-section is
successfully reconstructed from a calculated line scan of hemicycle su
rface composed of a single element.