Measurements and Monte Carlo simulations of impact ionization in the base-c
ollector region of SiGe HBTs are presented. A device with low germanium con
centration (graded from 0 to 12%) is considered and no differences are foun
d between the experimental multiplication factor in that device and the cor
responding silicon control. Because impact ionization (II) occurs inside th
e bulk-Si collector, phonon and II scattering rates for bulk silicon can be
used in the Monte Carlo simulation, avoiding the need to model the straine
d SiGe layers. Full-Band Monte Carlo simulations are shown to reproduce the
multiplication factors measured in SiGe devices featuring different collec
tor profiles.