Determination of inorganic fluorine in high-purity silane

Authors
Krylov, VA Tikhonova, EA Chernova, OY Balabanov, VV Kuleshova, NV
Citation
Va. Krylov et al., Determination of inorganic fluorine in high-purity silane, J ANALYT CH, 56(10), 2001, pp. 925-928
Citations number
9
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
JOURNAL OF ANALYTICAL CHEMISTRY
ISSN journal
10619348 → ACNP
Volume
56
Issue
10
Year of publication
2001
Pages
925 - 928
Database
ISI
SICI code
1061-9348(200110)56:10<925:DOIFIH>2.0.ZU;2-K
Abstract
A method was proposed for determining inorganic fluorine in high-purity sil ane. The method is based on the hydrolytic extraction of fluorine as fluori des to the aqueous phase, followed by the analysis of the extract by ion ch romatography with a conductometric detector. The detection limit for inorga nic fluorine was 1 x 10(-5) mass %.