Differential heterodyne microscope for high resolving surface profiling: Control over parameters and optimization

Authors
Zolotov, EM Baranov, DV Yegorov, AA
Citation
Em. Zolotov et al., Differential heterodyne microscope for high resolving surface profiling: Control over parameters and optimization, LASER PHYS, 11(10), 2001, pp. 1120-1123
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
LASER PHYSICS
ISSN journal
1054660X → ACNP
Volume
11
Issue
10
Year of publication
2001
Pages
1120 - 1123
Database
ISI
SICI code
1054-660X(200110)11:10<1120:DHMFHR>2.0.ZU;2-Y
Abstract
Sensitivity of differential heterodyne microscope to adjustment of its opti cal scheme is investigated. Maximum aperture of photodetector is estimated for point detector approach. The defocusing limits for probe beams are dete rmined and the algorithm for matching the Fourier plane center with point d etector is developed.