In this paper, we demonstrate the simulation of XPD experiments through the
oretical calculations. We present examples, e.g. oxygen-induced Cu(210) sur
face and oxygenated diamond surface, to illustrate how to obtain the optimi
zed XPD experimental parameters by MSCD simulations for distinguishing two
different models. Our results suggest that for the adsorbate-induced recons
tructions on metal or semiconductor surfaces, XPD from adsorbate is more se
nsitive to the detailed surface structure than XPD from bulk elements. Whet
her to choose energy-scanned or angle-scanned mode will depend on the syste
ms under investigation. One should check any limitations in the instruments
used, and then perform the theoretical simulations for typical available p
arameters in order to select the best mode, emitters, and optimized paramet
ers.