A systematic study of the nature of arsenic incorporation in GaN grown by m
olecular-beam epitaxy is presented. The samples were grown with concentrati
ons of arsenic ranging from 3.4x10(17) to 4.2x10(18) cm(-3). Secondary ion
mass spectroscopy data show that increasing the As concentration has the ef
fect of increasing the amount of As in the nitrogen site as compared to As
in the gallium site. This trend is used to explain the reduction in carrier
mobility with increasing As concentration. (C) 2001 American Institute of
Physics.