ACCURATE DETERMINATION OF THE SPHERICAL-ABERRATION COEFFICIENT OF A FIELD-EMISSION GUN ELECTRON-MICROSCOPE USING DIGITAL ELECTRON-MICROGRAPHS

Authors
REN G DUAN XF PENG LM
Citation
G. Ren et al., ACCURATE DETERMINATION OF THE SPHERICAL-ABERRATION COEFFICIENT OF A FIELD-EMISSION GUN ELECTRON-MICROSCOPE USING DIGITAL ELECTRON-MICROGRAPHS, Progress in Natural Science, 7(4), 1997, pp. 432-441
Citations number
15
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Progress in Natural Science → ACNP
ISSN journal
10020071
Volume
7
Issue
4
Year of publication
1997
Pages
432 - 441
Database
ISI
SICI code
1002-0071(1997)7:4<432:ADOTSC>2.0.ZU;2-F
Abstract
It is shown that for a weak phase object the image formation process i n a field-emission gun (FEG) electron microscope is the same as in a c onventional transmission electron microscope, and that the spherical a berration coefficient of an FEG electron microscope may be measured by using an amorphous thin film. Methods were developed for accurate det ermination of the spherical aberration coefficient of an FEG electron microscope using digital electron micrographs.