Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Reactive accelerated cluster erosion (RACE) of single crystal artificial di amond has been used to fabricate various nano- and microstructures, Carbond ioxide clusters of a-bout 1000 molecules are accelerated to 100 keV to act as the eroding agent. Using movable shadow masks, the accelerated cluster b eam may erode staircase structures acting as an optical grating. A cycloid gear has been generated cia a stationary nickel mask. Non-reactive accelera ted cluster erosion using argon clusters will be considered for comparison.